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Measuring inorganic impurities in semiconductor manufacturing

Agilent Technologies
27 Jul 2022

The new edition of the Agilent ICP-QQQ Semiconductor Applications Compendium contains 20+ optimized methods to measure impurities in:

  • Wafer precursor and substrate materials
  • Ultrapure water and hydrogen peroxide
  • Acids and other process chemicals
  • Solvents and other organic chemicals
  • High purity metals
  • Precursor and process gases

The methods include instrument configuration and tuning parameters, sample and standard preparation details and representative results.

The compendium will be a valuable resource for suppliers to fab plants aiming to control inorganic impurities to meet product specifications.

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Mass SpectrometryMass spectrometry (MS) is a powerful analytical technique used to identify and quantify molecules based on the mass-to-charge ratio of gas-phase ions. It provides detailed information about the structure, composition, and properties of compounds and is widely used across fields such as environmental monitoring, materials science, drug discovery and development, food and beverage testing, and wider chemical research. Key MS techniques include tandem mass spectrometry (MS/MS), liquid chromatography–mass spectrometry (LS-MS) and inductively coupled plasma (ICP-MS). Choosing from these wide range of techniques and technologies can be a daunting task, so keep up to date with scientific applications, performance expectations, and customer reviews here all in one place. Visit our product directory to receive quotes direct from the manufacturer. Trace Level ImpuritiesTrace level impurities refer to low concentrations of unwanted substances found in chemicals, pharmaceuticals, and other products. Detecting and removing these impurities is crucial for product safety and regulatory compliance. Explore trace impurity analysis tools in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.SemiconductorsMetalsMetal analysis is critical in various industries, including environmental monitoring, food safety, and pharmaceuticals. Techniques such as ICP-MS and atomic absorption spectrometry are commonly used to detect trace metals. Explore metal analysis tools in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.

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