mr - I T85
micro resist technology GmbHThe new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components. Unique Features Unpolar thermoplastic Excellent film quality Beneficial flow behaviour during imprinting, low imprint pressure Excellent UV and optical transparency High plasma etch resistance - comparable to novolak-based photoresists - selectivity to silicon 9:1 (S…