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mr - I T85
The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components. Unique Features Unpolar thermoplastic Excellent film quality Beneficial flow behaviour during imprinting, low imprint pressure Excellent UV and optical transparency High plasma etch resistance - comparable to novolak-based photoresists - selectivity to silicon 9:1 (S…
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Description
The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components.
Unique Features
- Unpolar thermoplastic
- Excellent film quality
- Beneficial flow behaviour during imprinting, low imprint pressure
- Excellent UV and optical transparency
- High plasma etch resistance
- comparable to novolak-based photoresists
- selectivity to silicon 9:1 (Si / mr-I T85) - High chemical stability
- high resistance to acids, bases and polar solvents
- no interactions with conventional photoresists
