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ZEISS Crossbeam - Enabling Smart FIB Work with SmartSEM

ZEISS Crossbeam - Enabling Smart FIB Work with SmartSEM

15 May 2016

This application note describes SmartFIB, a new user interface for FIB operation in ZEISS Crossbeam instruments, and some of its capabilities. SmartFIB is an extension of SmartSEM, the operating software of ZEISS scanning electron microscopes, which is active for ZEISS FIB-SEM systems. When milling an object by focused ion beam (FIB) it is essential to control a large set of patterning parameters. These define the so-called FIB milling strategy. Minor changes in the milling strategy can have a dramatic impact on the results achieved. SmartFIB allows the user to flexibly tailor his FIB milling strategy to obtain the desired results by providing access to all relevant parameters like dose, pixel spacing, pixel dwell time and FIB current.

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Electron MicroscopyElectron microscopes (EM) are used to create high-resolution images of samples at the nanoscale by means of an accelerated beam of electrons as a source of illumination. Types of electron microscope include scanning electron microscopes (SEM), transmission electron microscopes (TEM), scanning transmission electron microscopes (STEM) and cryo-electron microscopes. Focused ion beam (FIB) microscopes are useful for modifying or milling a sample surface with nanometer precision, as well as imaging. Find the best electron microscopes in our peer-reviewed product directory: compare products, check customer reviews and receive pricing direct from manufacturers.Software PlatformsSoftware platforms are useful for various stages of laboratory experiments from data collection to data storage and processing. For instance lab software is available for system control, data management, data analysis and qualification / validation.MillingMilling is the process of grinding, crushing, or cutting materials into smaller parts. In scientific research, it plays a crucial role in sample preparation for analysis in areas such as food, pharmaceuticals, and materials science. Explore milling equipment in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.MicroscopyMicroscopy is a technique used to observe small objects in detail, from cells to materials, using light or electron microscopes. It enables researchers to examine structures with high resolution, aiding in fields such as biology, medicine, and materials science. With advanced microscopy techniques, scientists can gain insights into cellular processes, tissue structures, and material properties. Explore the best microscopy solutions in our peer-reviewed product directory, compare products, read customer reviews, and get pricing directly from manufacturers.SEMScanning Electron Microscopy (SEM) is a technique that uses a focused electron beam to scan a sample and create high-resolution images. It is widely used in materials science, nanotechnology, and biological research. Explore SEM systems in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.
ZEISS Crossbeam - Enabling Smart FIB Work with SmartSEM