Using Beam Chemistries with SEM, FIB and DualBeam for Surface Modification

19 Jul 2015

Charged particle beams in scanning electron microscope (SEM) and focused ion beam (FIB) equipment are generally used for imaging and direct surface modification of samples held under vacuum. FIB or SEM can accurately deposit or preferentially etch specific materials when small quantities of gas are introduced near to the sample surface whilst the beam is scanning. This allows quick and easy customization and modification of a wide range of structures on a micro and nano-scale. This application notes discusses the use of DualBeam, a combined FIB and SEM instrument, for such purposes.

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Electron MicroscopyElectron microscopes (EM) are used to create high-resolution images of samples at the nanoscale by means of an accelerated beam of electrons as a source of illumination. Types of electron microscope include scanning electron microscopes (SEM), transmission electron microscopes (TEM), scanning transmission electron microscopes (STEM) and cryo-electron microscopes. Focused ion beam (FIB) microscopes are useful for modifying or milling a sample surface with nanometer precision, as well as imaging. Find the best electron microscopes in our peer-reviewed product directory: compare products, check customer reviews and receive pricing direct from manufacturers.Optical Gas ImagingMicroscopyMicroscopy is a technique used to observe small objects in detail, from cells to materials, using light or electron microscopes. It enables researchers to examine structures with high resolution, aiding in fields such as biology, medicine, and materials science. With advanced microscopy techniques, scientists can gain insights into cellular processes, tissue structures, and material properties. Explore the best microscopy solutions in our peer-reviewed product directory, compare products, read customer reviews, and get pricing directly from manufacturers.Surface AnalysisSEMScanning Electron Microscopy (SEM) is a technique that uses a focused electron beam to scan a sample and create high-resolution images. It is widely used in materials science, nanotechnology, and biological research. Explore SEM systems in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.
Using Beam Chemistries with SEM, FIB and DualBeam for Surface Modification