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Monitoring Labile, High-Boiling Organic Vapors Such As Those Found in Cleanroom Air in Semiconductor Plants

21 Jul 2014

This application note describes how Markes’ thermal desorption technology can be used to detect semi-volatile organic compounds (SVOCs) in air – an application that is of particular relevance to sampling in the cleanroom facilities of semiconductor plants.

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Gas ChromatographyGas chromatography (GC) is an analytical technique used to separate and quantitate mixtures of small and volatile compounds. Gas chromatographs or GC systems include components such as GC columns, detectors, pumps and autosamplers. Choose from packed or capillary GC columns, flame ionization (FID), photoionization (PID) electron capture detectors and selective or non-selective detectors. Find the best gas chromatographs in our peer-reviewed product directory: compare products, check customer reviews and receive pricing direct from manufacturers.Thermal ProcessesSemi Volatile Organic CompoundsSemi volatiles organic compounds (SVOCs) are a groups of compounds that have a low boiling point and evaporate above room temperature. SVOCs include phenols and polynuclear aromatic hydrocarbons (PAH).
Monitoring Labile, High-Boiling Organic Vapors Such As Those Found in Cleanroom Air in Semiconductor Plants