Fabrication and characterization of nanofluidic devices for DNA optical mapping
Fast and flexible nanofluidic prototyping with FIB and SEM
12 Apr 2023In this application note, ZEISS presents the fabrication and characterization of nanofluidic devices for DNA optical mapping. The devices were produced using FIB-SEM and UV nanoimprint lithography. The focused ion beam (FIB) nanopatterning method enabled the creation of nanochannels of different shapes, cross sections, and depths, including 3D funnel-shaped inlets to optimize DNA flow. The polymer-on-glass stamp created through UV nanoimprint lithography was used to make the actual chip. The local charge compensation technique allowed for high-resolution scanning electron microscopy (SEM) characterization of the devices without any metal coating. The devices have the potential to revolutionize healthcare by enabling fast and affordable DNA screening for personalized medicine.