MIRA FEG-SEM Series

This new generation of MIRA field emission scanning electron microscopes provides users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all the while maintaining the best price to performance ratio.

The MIRA series was designed with respect to a wide range of SEM applications and needs in today’s research and industry. Its excellent resolution at high beam currents has proved to be advantageous for analytical applications such as EBSD,WDX, etc. MIRA3 field emission scanning electron microscopes are manufactured in configurations with LM, XM and GM chambers.

All MIRA chambers (LM, XM and GM) provide superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD. Option of extra-large chambers (XM, GM) with robust stage able to accommodate large samples.

Features:

• High brightness Schottky emitter for high-resolution/highcurrent/low-noise imaging.
• Unique three-lens Wide Field OpticsTM design offering a variety of working and displaying modes.
• Proprietary Intermediate Lens (IML), which works as an ´aperture changer´, changing the effective final aperture electromagnetically.
• Real time In-Flight Beam TracingTM for performance and beam optimization, integrated with the well-established software Electron Optical Design. It also includes direct and continuous control of the beam current and spot size.
• Extraordinary resolution with powerful optional In-Beam Detector.
• Fully automated electron optics set-up and alignment.
• Fast imaging rate.
• Unique live stereoscopic imaging using advanced 3D Beam Technology opens up the micro and nano-world for an amazing 3D experience and 3D navigation.

Models:

MIRA3 LM

A fully PC controlled FE SEM intended for both – for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity.

MIRA3 XM

A fully PC controlled FE-SEM – for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity. Sophisticated user-friendly software for microscope control and image capturing using Windows™ platform.

MIRA3 GM

A fully PC controlled high resolution FE-SEM intended for both - for high vacuum as well as for low vacuum operations. Outstanding electron-optical properties, flicker-free digital image with super clarity. Sophisticated user-friendly software for microscope control and image capturing using Windows™ platform.