ZEISS Enters the Software Sector with Analysis Solution

ZEISS has developed and released the new software solution ZEISS AutoAnalysis. The application software analyzes aerial images, taken by the photomask qualification tool ZEISS AIMS. It runs fully automated and provides immediate, standardized results.

The software solution provides fully automated analysis of ZEISS AIMS aerial images in parallel to the measurements as they are being captured. Manual interaction is no longer required, thus eliminating human error, but manual analysis is still available if desired. Analysis results are automatically entered into customized report layouts. ZEISS AutoAnalysis communicates directly with the ZEISS AIMS tools. ZEISS AutoAnalysis has been in use at one customer site for several months. Two more installations will follow in February.

The software was developed by ZEISS in close cooperation with customers. Anthony Garetto, Product Manager at ZEISS says “For us as a tool supplier, the motivation to enable our customers to shorten turn-around times, improve reliability and save time and manpower was a strong driver to face the challenge of developing a software solution. With our knowledge as the experts in aerial imaging technology and the expertise of our development partners, together we could now release a comprehensive software solution that fits the demands of the mask makers.”

ZEISS presents ZEISS AIMS AutoAnalysis during SEMICON Korea, February 4-6, booth #5330.