Emission spectroscopy from Horiba - a unique blend of high resolution optics...

Since the launch of the instrument, reports on a depth resolution below the nanometre have been published and with the pulse mode the instrument is capable to operate on thin fragile or thermal sensitive materials (PZT, thin coated glasses, polymers) making it an ideal tool for universities and research centres.

The instrument features the unique combination of high resolution multiple optics (polychromator, monochromator) with HDD channels providing the ultimate dynamic range and full emission spectrum measurement.

The Quantum XP™ operating software offers the TimePlus function – an automatic extension of the measurement time during analysis - , data bases of sputtering rates, molecular and line spectra, the calculation of trends to separate bulk information from surface transient signals and the layer mode for the highest precision in calibration for surface and depth profile analysis.

Compliant with the ISO 14707 and ISO 16962 standards, the instrument is also ideal for industries requiring coating process characterisation and control. Its large sample chamber can accommodate very large samples and the combination of multiple anodes, and various accessories permit to run small or odd shape samples.