DigiScreen Large Area Mapping Spectroscopic Reflectometer

HORIBA Jobin Yvon introduces the DigiScreen, a new metrology tool capable of characterising deposited film thickness on large area glass substrates.

With spatial resolution of < 2 mm the DigiScreen measures film thickness in the range 100 nm to several microns with acquisition times of < 1 second / point. Delivered to major process chamber manufacturer for quality control of FPDs, the DigiScreen has proven to be a reliable metrology tool that provides accurate film thickness uniformity over hundreds of points with very high throughputs.

The DigiScreen can characterise materials such as SiN, SiON, a-Si(n+), a-Si(HDR, LDR), LTPS, c-Si, Silane based SiOx and TEOS, with similar accuracy and precision to Large Area Mapping Ellipsometers.

The DigiScreen combined high throughput and accurate film thickness uniformity capabilities. It is the perfect metrology tool for quality control of large area display.